ISO 14644-12:2018

недоступно на русском языке

Текущий статус : Опубликовано (Hа стадии пересмотра)

	Формат	Язык
std 1 63	PDF + ePub
std 2 63	Бумажный

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Тезис

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.

The monitoring given in this document is for use mainly in "operational" states.

NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.

NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.

NOTE 3 Health and safety considerations are excluded from this document.

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Общая информация

Текущий статус
: Опубликовано

Дата публикации
: 2018-08

Этап
: Рассылка краткого отчета о пересмотре [90.60]
Версия
: 1
Технический комитет :
ISO/TC 209

ICS :
13.040.35
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